Clean rooms are one of the most demanding environments to humidify
as they require particulate-free humidity delivered at a rate to meet
relative humidity tolerances as low as 0.5%. Inadequate humidity can
cause equipment failures during the sensitive manufacturing process.
The design of humidification systems for clean rooms requires an
in-depth knowledge of temperature and humidity controls. For the
semi-conductor industry, the humidity requirements vary from 30-
50% RH with accuracy tolerances varying from 0.5-5% RH.